Search

x
中国物理学会期刊
Advanced Search
Zhu Jian-Yun, Liu Lu, Li Yu-Qiang, Xu Jing-Ping. Effect of annealing atmosphere on characteristics of MONOS with LaTiON or HfLaON as charge storage layerJ. Acta Physica Sinica, 2013, 62(3): 038501. DOI: 10.7498/aps.62.038501
Citation: Zhu Jian-Yun, Liu Lu, Li Yu-Qiang, Xu Jing-Ping. Effect of annealing atmosphere on characteristics of MONOS with LaTiON or HfLaON as charge storage layerJ. Acta Physica Sinica, 2013, 62(3): 038501. DOI: 10.7498/aps.62.038501
shu

Effect of annealing atmosphere on characteristics of MONOS with LaTiON or HfLaON as charge storage layer

Acta Phys. Sin., 2013, 62(3): 038501.
DOI: 10.7498/aps.62.038501
CSTR: 32037.14.aps.62.038501
PDF
导出引用

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return