Gas-sensing properties at room temperature for the sensors based on tungsten oxide thin films sputtered on n-type ordered porous silicon

Hu Ming; Liu Qing-Lin; Jia Ding-Li; Li Ming-Da

doi:10.7498/aps.62.057102

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Hu Ming, Liu Qing-Lin, Jia Ding-Li, Li Ming-Da. Gas-sensing properties at room temperature for the sensors based on tungsten oxide thin films sputtered on n-type ordered porous siliconJ. Acta Physica Sinica, 2013, 62(5): 057102. DOI: 10.7498/aps.62.057102

Citation:

Hu Ming, Liu Qing-Lin, Jia Ding-Li, Li Ming-Da. Gas-sensing properties at room temperature for the sensors based on tungsten oxide thin films sputtered on n-type ordered porous siliconJ. Acta Physica Sinica, 2013, 62(5): 057102. DOI: 10.7498/aps.62.057102

Citation:

Hu Ming, Liu Qing-Lin, Jia Ding-Li, Li Ming-Da. Gas-sensing properties at room temperature for the sensors based on tungsten oxide thin films sputtered on n-type ordered porous siliconJ. Acta Physica Sinica, 2013, 62(5): 057102. DOI: 10.7498/aps.62.057102