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中国物理学会期刊
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Yun Zhi-Qiang, Wei Ru-Sheng, Li Wei, Luo Wei-Wei, Wu Qiang, Xu Xian-Gang, Zhang Xin-Zheng. Sub-diffraction-limit fabrication of 6H-SiC with femtosecond laserJ. Acta Physica Sinica, 2013, 62(6): 068101. DOI: 10.7498/aps.62.068101
Citation: Yun Zhi-Qiang, Wei Ru-Sheng, Li Wei, Luo Wei-Wei, Wu Qiang, Xu Xian-Gang, Zhang Xin-Zheng. Sub-diffraction-limit fabrication of 6H-SiC with femtosecond laserJ. Acta Physica Sinica, 2013, 62(6): 068101. DOI: 10.7498/aps.62.068101
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Sub-diffraction-limit fabrication of 6H-SiC with femtosecond laser

Acta Phys. Sin., 2013, 62(6): 068101.
DOI: 10.7498/aps.62.068101
CSTR: 32037.14.aps.62.068101
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