Li Tian-Hao, Zheng Guo-Heng, Liu Chao-Ran, Xia Wei-Wei, Li Dong-Xue, Duan Zhi-Yong. Analysis of gas isolation by prominent O-ring on the mold in compressional gas cushion press nanoimprint lithographyJ. Acta Physica Sinica, 2013, 62(6): 068103. DOI: 10.7498/aps.62.068103
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Citation:
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Li Tian-Hao, Zheng Guo-Heng, Liu Chao-Ran, Xia Wei-Wei, Li Dong-Xue, Duan Zhi-Yong. Analysis of gas isolation by prominent O-ring on the mold in compressional gas cushion press nanoimprint lithographyJ. Acta Physica Sinica, 2013, 62(6): 068103. DOI: 10.7498/aps.62.068103
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Li Tian-Hao, Zheng Guo-Heng, Liu Chao-Ran, Xia Wei-Wei, Li Dong-Xue, Duan Zhi-Yong. Analysis of gas isolation by prominent O-ring on the mold in compressional gas cushion press nanoimprint lithographyJ. Acta Physica Sinica, 2013, 62(6): 068103. DOI: 10.7498/aps.62.068103
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Citation:
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Li Tian-Hao, Zheng Guo-Heng, Liu Chao-Ran, Xia Wei-Wei, Li Dong-Xue, Duan Zhi-Yong. Analysis of gas isolation by prominent O-ring on the mold in compressional gas cushion press nanoimprint lithographyJ. Acta Physica Sinica, 2013, 62(6): 068103. DOI: 10.7498/aps.62.068103
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