Simulation of N2 microhollow cathode discharge and cathode sputtering by using a PIC/MC model

Zhang Lian-Zhu; Meng Xiu-Lan; Zhang Su; Gao Shu-Xia; Zhao Guo-Ming

doi:10.7498/aps.62.075201

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Zhang Lian-Zhu, Meng Xiu-Lan, Zhang Su, Gao Shu-Xia, Zhao Guo-Ming. Simulation of N2 microhollow cathode discharge and cathode sputtering by using a PIC/MC modelJ. Acta Physica Sinica, 2013, 62(7): 075201. DOI: 10.7498/aps.62.075201

Citation:

Zhang Lian-Zhu, Meng Xiu-Lan, Zhang Su, Gao Shu-Xia, Zhao Guo-Ming. Simulation of N2 microhollow cathode discharge and cathode sputtering by using a PIC/MC modelJ. Acta Physica Sinica, 2013, 62(7): 075201. DOI: 10.7498/aps.62.075201

Citation:

Zhang Lian-Zhu, Meng Xiu-Lan, Zhang Su, Gao Shu-Xia, Zhao Guo-Ming. Simulation of N2 microhollow cathode discharge and cathode sputtering by using a PIC/MC modelJ. Acta Physica Sinica, 2013, 62(7): 075201. DOI: 10.7498/aps.62.075201