Influence of nitrogen in diamond films on plasma etching

Wu Jun; Ma Zhi-Bin; Shen Wu-Lin; Yan Lei; Pan Xin; Wang Jian-Hua

doi:10.7498/aps.62.075202

Wu Jun, Ma Zhi-Bin, Shen Wu-Lin, Yan Lei, Pan Xin, Wang Jian-Hua. Influence of nitrogen in diamond films on plasma etchingJ. Acta Physica Sinica, 2013, 62(7): 075202. DOI: 10.7498/aps.62.075202

Citation:

Wu Jun, Ma Zhi-Bin, Shen Wu-Lin, Yan Lei, Pan Xin, Wang Jian-Hua. Influence of nitrogen in diamond films on plasma etchingJ. Acta Physica Sinica, 2013, 62(7): 075202. DOI: 10.7498/aps.62.075202

Citation:

Wu Jun, Ma Zhi-Bin, Shen Wu-Lin, Yan Lei, Pan Xin, Wang Jian-Hua. Influence of nitrogen in diamond films on plasma etchingJ. Acta Physica Sinica, 2013, 62(7): 075202. DOI: 10.7498/aps.62.075202