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Zhang Guang-Chao, Xu Jin. Investigation of copper precipitation in denuded zone in Czochralski siliconJ. Acta Physica Sinica, 2013, 62(7): 076103. DOI: 10.7498/aps.62.076103
Citation: Zhang Guang-Chao, Xu Jin. Investigation of copper precipitation in denuded zone in Czochralski siliconJ. Acta Physica Sinica, 2013, 62(7): 076103. DOI: 10.7498/aps.62.076103
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Investigation of copper precipitation in denuded zone in Czochralski silicon

Acta Phys. Sin., 2013, 62(7): 076103.
DOI: 10.7498/aps.62.076103
CSTR: 32037.14.aps.62.076103
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