Wu Liang-Liang, Zhao De-Gang, Li Liang, Le Ling-Cong, Chen Ping, Liu Zong-Shun, Jiang De-Sheng. Influence of growth conditions on the lateral grain size of AlN film grown by metal-organic chemical vapor depositionJ. Acta Physica Sinica, 2013, 62(8): 086102. DOI: 10.7498/aps.62.086102