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中国物理学会期刊
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Zheng Shu-Lin, Song Yi-Xu, Sun Xiao-Min. A three-dimensional surface evolution algorithm based on cellular model for etching processJ. Acta Physica Sinica, 2013, 62(10): 108201. DOI: 10.7498/aps.62.108201
Citation: Zheng Shu-Lin, Song Yi-Xu, Sun Xiao-Min. A three-dimensional surface evolution algorithm based on cellular model for etching processJ. Acta Physica Sinica, 2013, 62(10): 108201. DOI: 10.7498/aps.62.108201
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A three-dimensional surface evolution algorithm based on cellular model for etching process

Acta Phys. Sin., 2013, 62(10): 108201.
DOI: 10.7498/aps.62.108201
CSTR: 32037.14.aps.62.108201
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