Hong Bu-Shuang, Yuan Tao, Zou Shuai, Tang Zhong-Hua, Xu Dong-Sheng, Yu Yi-Qing, Wang Xu-Sheng, Xin Yu. Influence of addifion of electronegative gases on the properties of capacitively coupled Ar plasmasJ. Acta Physica Sinica, 2013, 62(11): 115202. DOI: 10.7498/aps.62.115202