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中国物理学会期刊
Jiang Qiang, Mao Xiu-Juan, Zhou Xi-Ying, Chang Wen-Long, Shao Jia-Jia, Chen Ming. Influence of applied magnetic field on properties of silicon nitride thin film with light trapping structure prepared by R.F. magnetron sputteringJ. Acta Physica Sinica, 2013, 62(11): 118103. DOI: 10.7498/aps.62.118103
Citation: Jiang Qiang, Mao Xiu-Juan, Zhou Xi-Ying, Chang Wen-Long, Shao Jia-Jia, Chen Ming. Influence of applied magnetic field on properties of silicon nitride thin film with light trapping structure prepared by R.F. magnetron sputteringJ. Acta Physica Sinica, 2013, 62(11): 118103. DOI: 10.7498/aps.62.118103

Influence of applied magnetic field on properties of silicon nitride thin film with light trapping structure prepared by R.F. magnetron sputtering

CSTR: 32037.14.aps.62.118103
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