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中国物理学会期刊
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Xia Wei-Wei, Zheng Guo-Heng, Li Tian-Hao, Liu Chao-Ran, Li Dong-Xue, Duan Zhi-Yong. Factors influencing filling degree in nanoimprint lithography with pseudoplastic fluidJ. Acta Physica Sinica, 2013, 62(18): 188105. DOI: 10.7498/aps.62.188105
Citation: Xia Wei-Wei, Zheng Guo-Heng, Li Tian-Hao, Liu Chao-Ran, Li Dong-Xue, Duan Zhi-Yong. Factors influencing filling degree in nanoimprint lithography with pseudoplastic fluidJ. Acta Physica Sinica, 2013, 62(18): 188105. DOI: 10.7498/aps.62.188105
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Factors influencing filling degree in nanoimprint lithography with pseudoplastic fluid

Acta Phys. Sin., 2013, 62(18): 188105.
DOI: 10.7498/aps.62.188105
CSTR: 32037.14.aps.62.188105
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