Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian. Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2013, 62(20): 205208. DOI: 10.7498/aps.62.205208
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Citation:
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Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian. Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2013, 62(20): 205208. DOI: 10.7498/aps.62.205208
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Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian. Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2013, 62(20): 205208. DOI: 10.7498/aps.62.205208
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Citation:
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Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian. Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2013, 62(20): 205208. DOI: 10.7498/aps.62.205208
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