Study on porous silicon template for nanoimprint lithography

Zhang Zheng; Xu Zhi-Mou; Sun Tang-You; Xu Hai-Feng; Chen Cun-Hua; Peng Jing

doi:10.7498/aps.63.018102

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Zhang Zheng, Xu Zhi-Mou, Sun Tang-You, Xu Hai-Feng, Chen Cun-Hua, Peng Jing. Study on porous silicon template for nanoimprint lithographyJ. Acta Physica Sinica, 2014, 63(1): 018102. DOI: 10.7498/aps.63.018102

Citation:

Zhang Zheng, Xu Zhi-Mou, Sun Tang-You, Xu Hai-Feng, Chen Cun-Hua, Peng Jing. Study on porous silicon template for nanoimprint lithographyJ. Acta Physica Sinica, 2014, 63(1): 018102. DOI: 10.7498/aps.63.018102

Citation:

Zhang Zheng, Xu Zhi-Mou, Sun Tang-You, Xu Hai-Feng, Chen Cun-Hua, Peng Jing. Study on porous silicon template for nanoimprint lithographyJ. Acta Physica Sinica, 2014, 63(1): 018102. DOI: 10.7498/aps.63.018102