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中国物理学会期刊
Jiang Jin-Long, Huang Hao, Wang Qiong, Wang Shan-Min, Wei Zhi-Qiang, Yang Hua, Hao Jun-Ying. Effect of deposition temperature on growth, structure and mechanical properties of diamond-like carbon films co-doped by titanium and siliconJ. Acta Physica Sinica, 2014, 63(2): 028104. DOI: 10.7498/aps.63.028104
Citation: Jiang Jin-Long, Huang Hao, Wang Qiong, Wang Shan-Min, Wei Zhi-Qiang, Yang Hua, Hao Jun-Ying. Effect of deposition temperature on growth, structure and mechanical properties of diamond-like carbon films co-doped by titanium and siliconJ. Acta Physica Sinica, 2014, 63(2): 028104. DOI: 10.7498/aps.63.028104

Effect of deposition temperature on growth, structure and mechanical properties of diamond-like carbon films co-doped by titanium and silicon

CSTR: 32037.14.aps.63.028104
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