Effect of the trench shape on the electrical properties of silicon based trench barrier schottky diode

Zhai Dong-Yuan; Zhao Yi; Cai Yin-Fei; Shi Yi; Zheng You-Dou

doi:10.7498/aps.63.127201

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Zhai Dong-Yuan, Zhao Yi, Cai Yin-Fei, Shi Yi, Zheng You-Dou. Effect of the trench shape on the electrical properties of silicon based trench barrier schottky diodeJ. Acta Physica Sinica, 2014, 63(12): 127201. DOI: 10.7498/aps.63.127201

Citation:

Zhai Dong-Yuan, Zhao Yi, Cai Yin-Fei, Shi Yi, Zheng You-Dou. Effect of the trench shape on the electrical properties of silicon based trench barrier schottky diodeJ. Acta Physica Sinica, 2014, 63(12): 127201. DOI: 10.7498/aps.63.127201

Citation:

Zhai Dong-Yuan, Zhao Yi, Cai Yin-Fei, Shi Yi, Zheng You-Dou. Effect of the trench shape on the electrical properties of silicon based trench barrier schottky diodeJ. Acta Physica Sinica, 2014, 63(12): 127201. DOI: 10.7498/aps.63.127201