Peng Jin, Chen Guang-Qi, Song Yi-Chi, Gu Kun-Ming, Tang Jiao-Ning. Study on electrical performance of metal copper films deposited by magnetron sputtering on polyimide flexible substratesJ. Acta Physica Sinica, 2014, 63(13): 138101. DOI: 10.7498/aps.63.138101
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Citation:
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Peng Jin, Chen Guang-Qi, Song Yi-Chi, Gu Kun-Ming, Tang Jiao-Ning. Study on electrical performance of metal copper films deposited by magnetron sputtering on polyimide flexible substratesJ. Acta Physica Sinica, 2014, 63(13): 138101. DOI: 10.7498/aps.63.138101
|
Peng Jin, Chen Guang-Qi, Song Yi-Chi, Gu Kun-Ming, Tang Jiao-Ning. Study on electrical performance of metal copper films deposited by magnetron sputtering on polyimide flexible substratesJ. Acta Physica Sinica, 2014, 63(13): 138101. DOI: 10.7498/aps.63.138101
|
Citation:
|
Peng Jin, Chen Guang-Qi, Song Yi-Chi, Gu Kun-Ming, Tang Jiao-Ning. Study on electrical performance of metal copper films deposited by magnetron sputtering on polyimide flexible substratesJ. Acta Physica Sinica, 2014, 63(13): 138101. DOI: 10.7498/aps.63.138101
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