Investigation on range distribution of Er ions implanted in silicon-on-insulator

Qin Xi-Feng; Ma Gui-Jie; Shi Shu-Hua; Wang Feng-Xiang; Fu Gang; Zhao Jin-Hua

doi:10.7498/aps.63.176101

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Qin Xi-Feng, Ma Gui-Jie, Shi Shu-Hua, Wang Feng-Xiang, Fu Gang, Zhao Jin-Hua. Investigation on range distribution of Er ions implanted in silicon-on-insulatorJ. Acta Physica Sinica, 2014, 63(17): 176101. DOI: 10.7498/aps.63.176101

Citation:

Qin Xi-Feng, Ma Gui-Jie, Shi Shu-Hua, Wang Feng-Xiang, Fu Gang, Zhao Jin-Hua. Investigation on range distribution of Er ions implanted in silicon-on-insulatorJ. Acta Physica Sinica, 2014, 63(17): 176101. DOI: 10.7498/aps.63.176101

Citation:

Qin Xi-Feng, Ma Gui-Jie, Shi Shu-Hua, Wang Feng-Xiang, Fu Gang, Zhao Jin-Hua. Investigation on range distribution of Er ions implanted in silicon-on-insulatorJ. Acta Physica Sinica, 2014, 63(17): 176101. DOI: 10.7498/aps.63.176101