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中国物理学会期刊
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Zhang Hai-Long, Liu Feng-Zhen, Zhu Mei-Fang. Influence of shadowing effect on morphology and microstructure of silicon thin film in chemical vapor depositionJ. Acta Physica Sinica, 2014, 63(17): 177303. DOI: 10.7498/aps.63.177303
Citation: Zhang Hai-Long, Liu Feng-Zhen, Zhu Mei-Fang. Influence of shadowing effect on morphology and microstructure of silicon thin film in chemical vapor depositionJ. Acta Physica Sinica, 2014, 63(17): 177303. DOI: 10.7498/aps.63.177303
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Influence of shadowing effect on morphology and microstructure of silicon thin film in chemical vapor deposition

Acta Phys. Sin., 2014, 63(17): 177303.
DOI: 10.7498/aps.63.177303
CSTR: 32037.14.aps.63.177303
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