Hao Ying-Ying, Meng Xiu-Lan, Yao Fu-Bao, Zhao Guo-Ming, Wang Jing, Zhang Lian-Zhu. Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo modelJ. Acta Physica Sinica, 2014, 63(18): 185205. DOI: 10.7498/aps.63.185205
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Citation:
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Hao Ying-Ying, Meng Xiu-Lan, Yao Fu-Bao, Zhao Guo-Ming, Wang Jing, Zhang Lian-Zhu. Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo modelJ. Acta Physica Sinica, 2014, 63(18): 185205. DOI: 10.7498/aps.63.185205
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Hao Ying-Ying, Meng Xiu-Lan, Yao Fu-Bao, Zhao Guo-Ming, Wang Jing, Zhang Lian-Zhu. Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo modelJ. Acta Physica Sinica, 2014, 63(18): 185205. DOI: 10.7498/aps.63.185205
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Citation:
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Hao Ying-Ying, Meng Xiu-Lan, Yao Fu-Bao, Zhao Guo-Ming, Wang Jing, Zhang Lian-Zhu. Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo modelJ. Acta Physica Sinica, 2014, 63(18): 185205. DOI: 10.7498/aps.63.185205
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