Effect of titanium ion energy on surface structure during the amorphous titanium dioxide film deposition

Chen Xian; Wang Yan-Wu; Wang Xiao-Yan; An Shu-Dong; Wang Xiao-Bo; Zhao Yu-Qing

doi:10.7498/aps.63.246801

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Chen Xian, Wang Yan-Wu, Wang Xiao-Yan, An Shu-Dong, Wang Xiao-Bo, Zhao Yu-Qing. Effect of titanium ion energy on surface structure during the amorphous titanium dioxide film depositionJ. Acta Physica Sinica, 2014, 63(24): 246801. DOI: 10.7498/aps.63.246801

Citation:

Chen Xian, Wang Yan-Wu, Wang Xiao-Yan, An Shu-Dong, Wang Xiao-Bo, Zhao Yu-Qing. Effect of titanium ion energy on surface structure during the amorphous titanium dioxide film depositionJ. Acta Physica Sinica, 2014, 63(24): 246801. DOI: 10.7498/aps.63.246801

Citation:

Chen Xian, Wang Yan-Wu, Wang Xiao-Yan, An Shu-Dong, Wang Xiao-Bo, Zhao Yu-Qing. Effect of titanium ion energy on surface structure during the amorphous titanium dioxide film depositionJ. Acta Physica Sinica, 2014, 63(24): 246801. DOI: 10.7498/aps.63.246801