Nano-scale lithography and in-situ electrical measurements based on the micro-chips in a transmission electron microscope

Zhang Chao; Fang Liang; Sui Bing-Cai; Xu Qiang; Wang Hui

doi:10.7498/aps.63.248105

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Zhang Chao, Fang Liang, Sui Bing-Cai, Xu Qiang, Wang Hui. Nano-scale lithography and in-situ electrical measurements based on the micro-chips in a transmission electron microscopeJ. Acta Physica Sinica, 2014, 63(24): 248105. DOI: 10.7498/aps.63.248105

Citation:

Zhang Chao, Fang Liang, Sui Bing-Cai, Xu Qiang, Wang Hui. Nano-scale lithography and in-situ electrical measurements based on the micro-chips in a transmission electron microscopeJ. Acta Physica Sinica, 2014, 63(24): 248105. DOI: 10.7498/aps.63.248105

Citation:

Zhang Chao, Fang Liang, Sui Bing-Cai, Xu Qiang, Wang Hui. Nano-scale lithography and in-situ electrical measurements based on the micro-chips in a transmission electron microscopeJ. Acta Physica Sinica, 2014, 63(24): 248105. DOI: 10.7498/aps.63.248105