An optimization method for ion etching yield modeling combined with factual etching data

Gao Yang-Fu; Sun Xiao-Min; Song Yi-Xu; Ruan Cong

doi:10.7498/aps.63.248201

Search

x

Gao Yang-Fu, Sun Xiao-Min, Song Yi-Xu, Ruan Cong. An optimization method for ion etching yield modeling combined with factual etching dataJ. Acta Physica Sinica, 2014, 63(24): 248201. DOI: 10.7498/aps.63.248201

Citation:

Gao Yang-Fu, Sun Xiao-Min, Song Yi-Xu, Ruan Cong. An optimization method for ion etching yield modeling combined with factual etching dataJ. Acta Physica Sinica, 2014, 63(24): 248201. DOI: 10.7498/aps.63.248201

Citation:

Gao Yang-Fu, Sun Xiao-Min, Song Yi-Xu, Ruan Cong. An optimization method for ion etching yield modeling combined with factual etching dataJ. Acta Physica Sinica, 2014, 63(24): 248201. DOI: 10.7498/aps.63.248201