Experimental study on scan imaging of silicon wafer by laser-induced photocarrier radiometry

Liu Jun-Yan; Song Peng; Qin Lei; Wang Fei; Wang Yang

doi:10.7498/aps.64.087804

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Liu Jun-Yan, Song Peng, Qin Lei, Wang Fei, Wang Yang. Experimental study on scan imaging of silicon wafer by laser-induced photocarrier radiometryJ. Acta Physica Sinica, 2015, 64(8): 087804. DOI: 10.7498/aps.64.087804

Citation:

Liu Jun-Yan, Song Peng, Qin Lei, Wang Fei, Wang Yang. Experimental study on scan imaging of silicon wafer by laser-induced photocarrier radiometryJ. Acta Physica Sinica, 2015, 64(8): 087804. DOI: 10.7498/aps.64.087804

Citation:

Liu Jun-Yan, Song Peng, Qin Lei, Wang Fei, Wang Yang. Experimental study on scan imaging of silicon wafer by laser-induced photocarrier radiometryJ. Acta Physica Sinica, 2015, 64(8): 087804. DOI: 10.7498/aps.64.087804