Accurate determination of thickness values and optical constants of absorbing thin films on opaque substrates with spectroscopic ellipsometry

Li Jiang; Tang Jing-You; Pei Wang; Wei Xian-Hua; Huang Feng

doi:10.7498/aps.64.110702

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Li Jiang, Tang Jing-You, Pei Wang, Wei Xian-Hua, Huang Feng. Accurate determination of thickness values and optical constants of absorbing thin films on opaque substrates with spectroscopic ellipsometryJ. Acta Physica Sinica, 2015, 64(11): 110702. DOI: 10.7498/aps.64.110702

Citation:

Li Jiang, Tang Jing-You, Pei Wang, Wei Xian-Hua, Huang Feng. Accurate determination of thickness values and optical constants of absorbing thin films on opaque substrates with spectroscopic ellipsometryJ. Acta Physica Sinica, 2015, 64(11): 110702. DOI: 10.7498/aps.64.110702

Citation:

Li Jiang, Tang Jing-You, Pei Wang, Wei Xian-Hua, Huang Feng. Accurate determination of thickness values and optical constants of absorbing thin films on opaque substrates with spectroscopic ellipsometryJ. Acta Physica Sinica, 2015, 64(11): 110702. DOI: 10.7498/aps.64.110702