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中国物理学会期刊
Dai Yue-Hua, Jin Bo, Wang Jia-Yu, Chen Zhen, Li Ning, Jiang Xian-Wei, Lu Wen-Juan, Li Xiao-Feng. First-principles study on the minimization of over-erase phenomenon in Si3N4 trapping layerJ. Acta Physica Sinica, 2015, 64(13): 133102. DOI: 10.7498/aps.64.133102
Citation: Dai Yue-Hua, Jin Bo, Wang Jia-Yu, Chen Zhen, Li Ning, Jiang Xian-Wei, Lu Wen-Juan, Li Xiao-Feng. First-principles study on the minimization of over-erase phenomenon in Si3N4 trapping layerJ. Acta Physica Sinica, 2015, 64(13): 133102. DOI: 10.7498/aps.64.133102

First-principles study on the minimization of over-erase phenomenon in Si3N4 trapping layer

CSTR: 32037.14.aps.64.133102
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