Experimental research on laser-produced Gd target plasma source for 6.7 nm lithography

Dou Yin-Ping; Xie Zhuo; Song Xiao-Lin; Tian Yong; Lin Jing-Quan

doi:10.7498/aps.64.235202

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Dou Yin-Ping, Xie Zhuo, Song Xiao-Lin, Tian Yong, Lin Jing-Quan. Experimental research on laser-produced Gd target plasma source for 6.7 nm lithographyJ. Acta Physica Sinica, 2015, 64(23): 235202. DOI: 10.7498/aps.64.235202

Citation:

Dou Yin-Ping, Xie Zhuo, Song Xiao-Lin, Tian Yong, Lin Jing-Quan. Experimental research on laser-produced Gd target plasma source for 6.7 nm lithographyJ. Acta Physica Sinica, 2015, 64(23): 235202. DOI: 10.7498/aps.64.235202

Citation:

Dou Yin-Ping, Xie Zhuo, Song Xiao-Lin, Tian Yong, Lin Jing-Quan. Experimental research on laser-produced Gd target plasma source for 6.7 nm lithographyJ. Acta Physica Sinica, 2015, 64(23): 235202. DOI: 10.7498/aps.64.235202