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Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu. Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequencyJ. Acta Physica Sinica, 2016, 65(5): 055203. DOI: 10.7498/aps.65.055203
Citation: Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu. Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequencyJ. Acta Physica Sinica, 2016, 65(5): 055203. DOI: 10.7498/aps.65.055203
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Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency

Acta Phys. Sin., 2016, 65(5): 055203.
DOI: 10.7498/aps.65.055203
CSTR: 32037.14.aps.65.055203
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