Deposition and thermal conductivity of diamond-like carbon film on a silicon substrate

Ai Li-Qiang; Zhang Xiang-Xiong; Chen Min; Xiong Da-Xi

doi:10.7498/aps.65.096501

Search

x

Ai Li-Qiang, Zhang Xiang-Xiong, Chen Min, Xiong Da-Xi. Deposition and thermal conductivity of diamond-like carbon film on a silicon substrateJ. Acta Physica Sinica, 2016, 65(9): 096501. DOI: 10.7498/aps.65.096501

Citation:

Ai Li-Qiang, Zhang Xiang-Xiong, Chen Min, Xiong Da-Xi. Deposition and thermal conductivity of diamond-like carbon film on a silicon substrateJ. Acta Physica Sinica, 2016, 65(9): 096501. DOI: 10.7498/aps.65.096501

Citation:

Ai Li-Qiang, Zhang Xiang-Xiong, Chen Min, Xiong Da-Xi. Deposition and thermal conductivity of diamond-like carbon film on a silicon substrateJ. Acta Physica Sinica, 2016, 65(9): 096501. DOI: 10.7498/aps.65.096501