Fabrication of Cu2ZnSnS4 thin films by sputtering quaternary compound target and the research of in-situ annealing

Zhao Qi-Chen; Hao Rui-Ting; Liu Si-Jia; Liu Xin-Xing; Chang Fa-Ran; Yang Min; Lu Yi-Lei; Wang Shu-Rong

doi:10.7498/aps.66.226801

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Zhao Qi-Chen, Hao Rui-Ting, Liu Si-Jia, Liu Xin-Xing, Chang Fa-Ran, Yang Min, Lu Yi-Lei, Wang Shu-Rong. Fabrication of Cu2ZnSnS4 thin films by sputtering quaternary compound target and the research of in-situ annealingJ. Acta Physica Sinica, 2017, 66(22): 226801. DOI: 10.7498/aps.66.226801

Citation:

Zhao Qi-Chen, Hao Rui-Ting, Liu Si-Jia, Liu Xin-Xing, Chang Fa-Ran, Yang Min, Lu Yi-Lei, Wang Shu-Rong. Fabrication of Cu2ZnSnS4 thin films by sputtering quaternary compound target and the research of in-situ annealingJ. Acta Physica Sinica, 2017, 66(22): 226801. DOI: 10.7498/aps.66.226801

Citation:

Zhao Qi-Chen, Hao Rui-Ting, Liu Si-Jia, Liu Xin-Xing, Chang Fa-Ran, Yang Min, Lu Yi-Lei, Wang Shu-Rong. Fabrication of Cu2ZnSnS4 thin films by sputtering quaternary compound target and the research of in-situ annealingJ. Acta Physica Sinica, 2017, 66(22): 226801. DOI: 10.7498/aps.66.226801