Different silicon crystal face index of inverted pyramid structure

Chen Quan-Sheng; Liu Yao-Ping; Chen Wei; Zhao Yan; Wu Jun-Tao; Wang Yan; Du Xiao-Long

doi:10.7498/aps.67.20181275

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Chen Quan-Sheng, Liu Yao-Ping, Chen Wei, Zhao Yan, Wu Jun-Tao, Wang Yan, Du Xiao-Long. Different silicon crystal face index of inverted pyramid structureJ. Acta Physica Sinica, 2018, 67(22): 226801. DOI: 10.7498/aps.67.20181275

Citation:

Chen Quan-Sheng, Liu Yao-Ping, Chen Wei, Zhao Yan, Wu Jun-Tao, Wang Yan, Du Xiao-Long. Different silicon crystal face index of inverted pyramid structureJ. Acta Physica Sinica, 2018, 67(22): 226801. DOI: 10.7498/aps.67.20181275

Citation:

Chen Quan-Sheng, Liu Yao-Ping, Chen Wei, Zhao Yan, Wu Jun-Tao, Wang Yan, Du Xiao-Long. Different silicon crystal face index of inverted pyramid structureJ. Acta Physica Sinica, 2018, 67(22): 226801. DOI: 10.7498/aps.67.20181275