Effect of annealing temperature on structure and stress properties of Ta2O5/SiO2 multilayer reflective coatings

Liu Bao-Jian; Duan Wei-Bo; Li Da-Qi; Yu De-Ming; Chen Gang; Wang Tian-Hong; Liu Ding-Quan

doi:10.7498/aps.68.20182247

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Liu Bao-Jian, Duan Wei-Bo, Li Da-Qi, Yu De-Ming, Chen Gang, Wang Tian-Hong, Liu Ding-Quan. Effect of annealing temperature on structure and stress properties of Ta2O5/SiO2 multilayer reflective coatingsJ. Acta Physica Sinica, 2019, 68(11): 114208. DOI: 10.7498/aps.68.20182247

Citation:

Liu Bao-Jian, Duan Wei-Bo, Li Da-Qi, Yu De-Ming, Chen Gang, Wang Tian-Hong, Liu Ding-Quan. Effect of annealing temperature on structure and stress properties of Ta2O5/SiO2 multilayer reflective coatingsJ. Acta Physica Sinica, 2019, 68(11): 114208. DOI: 10.7498/aps.68.20182247

Citation:

Liu Bao-Jian, Duan Wei-Bo, Li Da-Qi, Yu De-Ming, Chen Gang, Wang Tian-Hong, Liu Ding-Quan. Effect of annealing temperature on structure and stress properties of Ta2O5/SiO2 multilayer reflective coatingsJ. Acta Physica Sinica, 2019, 68(11): 114208. DOI: 10.7498/aps.68.20182247