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Zhang Gai-Ling, Hua Yue, Hao Ze-Yu, Ren Chun-Sheng. Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasmaJ. Acta Physica Sinica, 2019, 68(10): 105202. DOI: 10.7498/aps.68.20190071
Citation: Zhang Gai-Ling, Hua Yue, Hao Ze-Yu, Ren Chun-Sheng. Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasmaJ. Acta Physica Sinica, 2019, 68(10): 105202. DOI: 10.7498/aps.68.20190071
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Experimental investigation of plasma parameters in 13.56 MHz/2 MHz cylindrical inductively coupled plasma

Acta Phys. Sin., 2019, 68(10): 105202.
DOI: 10.7498/aps.68.20190071
CSTR: 32037.14.aps.68.20190071
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