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中国物理学会期刊
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Dong Zheng-Qiong, Zhao Hang, Zhu Jin-Long, Shi Ya-Ting. Influence of incident illumination on optical scattering measurement of typical photoresist nanostructureJ. Acta Physica Sinica, 2020, 69(3): 030601. DOI: 10.7498/aps.69.20191525
Citation: Dong Zheng-Qiong, Zhao Hang, Zhu Jin-Long, Shi Ya-Ting. Influence of incident illumination on optical scattering measurement of typical photoresist nanostructureJ. Acta Physica Sinica, 2020, 69(3): 030601. DOI: 10.7498/aps.69.20191525
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Influence of incident illumination on optical scattering measurement of typical photoresist nanostructure

Acta Phys. Sin., 2020, 69(3): 030601.
DOI: 10.7498/aps.69.20191525
CSTR: 32037.14.aps.69.20191525
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