Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe

Zhou Yu; Cao Li-Yang; Ma Xiao-Ping; Deng Li-Li; Xin Yu

doi:10.7498/aps.69.20191864

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Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu. Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probeJ. Acta Physica Sinica, 2020, 69(8): 085201. DOI: 10.7498/aps.69.20191864

Citation:

Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu. Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probeJ. Acta Physica Sinica, 2020, 69(8): 085201. DOI: 10.7498/aps.69.20191864

Citation:

Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu. Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probeJ. Acta Physica Sinica, 2020, 69(8): 085201. DOI: 10.7498/aps.69.20191864