Design and application of gas cluster accelerator for surface smoothing and nanostructures formation

Zeng Xiao-Mei; Vasiliy Pelenovich; Rakhim Rakhimov; Zuo Wen-Bin; Xing Bin; Luo Jin-Bao; Zhang Xiang-Yu; Fu De-Jun

doi:10.7498/aps.69.20191990

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Zeng Xiao-Mei, Vasiliy Pelenovich, Rakhim Rakhimov, Zuo Wen-Bin, Xing Bin, Luo Jin-Bao, Zhang Xiang-Yu, Fu De-Jun. Design and application of gas cluster accelerator for surface smoothing and nanostructures formationJ. Acta Physica Sinica, 2020, 69(9): 093601. DOI: 10.7498/aps.69.20191990

Citation:

Zeng Xiao-Mei, Vasiliy Pelenovich, Rakhim Rakhimov, Zuo Wen-Bin, Xing Bin, Luo Jin-Bao, Zhang Xiang-Yu, Fu De-Jun. Design and application of gas cluster accelerator for surface smoothing and nanostructures formationJ. Acta Physica Sinica, 2020, 69(9): 093601. DOI: 10.7498/aps.69.20191990

Citation:

Zeng Xiao-Mei, Vasiliy Pelenovich, Rakhim Rakhimov, Zuo Wen-Bin, Xing Bin, Luo Jin-Bao, Zhang Xiang-Yu, Fu De-Jun. Design and application of gas cluster accelerator for surface smoothing and nanostructures formationJ. Acta Physica Sinica, 2020, 69(9): 093601. DOI: 10.7498/aps.69.20191990