Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering technique

Shen Yong-Qing; Zhang Zhi-Qiang; Liao Bin; Wu Xian-Ying; Zhang Xu; Hua Qing-Song; Bao Man-Yu

doi:10.7498/aps.69.20200021

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Shen Yong-Qing, Zhang Zhi-Qiang, Liao Bin, Wu Xian-Ying, Zhang Xu, Hua Qing-Song, Bao Man-Yu. Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering techniqueJ. Acta Physica Sinica, 2020, 69(10): 108101. DOI: 10.7498/aps.69.20200021

Citation:

Shen Yong-Qing, Zhang Zhi-Qiang, Liao Bin, Wu Xian-Ying, Zhang Xu, Hua Qing-Song, Bao Man-Yu. Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering techniqueJ. Acta Physica Sinica, 2020, 69(10): 108101. DOI: 10.7498/aps.69.20200021

Citation:

Shen Yong-Qing, Zhang Zhi-Qiang, Liao Bin, Wu Xian-Ying, Zhang Xu, Hua Qing-Song, Bao Man-Yu. Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering techniqueJ. Acta Physica Sinica, 2020, 69(10): 108101. DOI: 10.7498/aps.69.20200021