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中国物理学会期刊
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Wang Qian, Zhao Jiang-Shan, Fan Yuan-Yuan, Guo Xin, Zhou Yi. Analysis of ArF excimer laser system discharge characteristics in different buffer gasesJ. Acta Physica Sinica, 2020, 69(17): 174207. DOI: 10.7498/aps.69.20200087
Citation: Wang Qian, Zhao Jiang-Shan, Fan Yuan-Yuan, Guo Xin, Zhou Yi. Analysis of ArF excimer laser system discharge characteristics in different buffer gasesJ. Acta Physica Sinica, 2020, 69(17): 174207. DOI: 10.7498/aps.69.20200087
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Analysis of ArF excimer laser system discharge characteristics in different buffer gases

Acta Phys. Sin., 2020, 69(17): 174207.
DOI: 10.7498/aps.69.20200087
CSTR: 32037.14.aps.69.20200087
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