Study of nano particle stripping and composition inspection on wafer surface

Liu Li-Tuo; Wang Chun-Long; Yu Xiao-Ya; Shi Jun-Kai; Li Yao; Chen Xiao-Mei; Zhou Wei-Hu

doi:10.7498/aps.69.20200517

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Liu Li-Tuo, Wang Chun-Long, Yu Xiao-Ya, Shi Jun-Kai, Li Yao, Chen Xiao-Mei, Zhou Wei-Hu. Study of nano particle stripping and composition inspection on wafer surfaceJ. Acta Physica Sinica, 2020, 69(16): 165201. DOI: 10.7498/aps.69.20200517

Citation:

Liu Li-Tuo, Wang Chun-Long, Yu Xiao-Ya, Shi Jun-Kai, Li Yao, Chen Xiao-Mei, Zhou Wei-Hu. Study of nano particle stripping and composition inspection on wafer surfaceJ. Acta Physica Sinica, 2020, 69(16): 165201. DOI: 10.7498/aps.69.20200517

Citation:

Liu Li-Tuo, Wang Chun-Long, Yu Xiao-Ya, Shi Jun-Kai, Li Yao, Chen Xiao-Mei, Zhou Wei-Hu. Study of nano particle stripping and composition inspection on wafer surfaceJ. Acta Physica Sinica, 2020, 69(16): 165201. DOI: 10.7498/aps.69.20200517