Hong Zi-Fan, Chen Hai-Feng, Jia Yi-Fan, Qi Qi, Liu Ying-Ying, Guo Li-Xin, Liu Xiang-Tai, Lu Qin, Li Li-Jun, Wang Shao-Qing, Guan Yun-He, Hu Qi-Ren. Characteristics of Ga2O3 epitaxial films on seed layer grown by magnetron sputteringJ. Acta Physica Sinica, 2020, 69(22): 228103. DOI: 10.7498/aps.69.20200810