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Guo Qin-Min, Qin Zhi-Hui. Development and application of vapor deposition technology in atomic manufacturingJ. Acta Physica Sinica, 2021, 70(2): 028101. DOI: 10.7498/aps.70.20201436
Citation: Guo Qin-Min, Qin Zhi-Hui. Development and application of vapor deposition technology in atomic manufacturingJ. Acta Physica Sinica, 2021, 70(2): 028101. DOI: 10.7498/aps.70.20201436
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Development and application of vapor deposition technology in atomic manufacturing

Acta Phys. Sin., 2021, 70(2): 028101.
DOI: 10.7498/aps.70.20201436
CSTR: 32037.14.aps.70.20201436
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