<i>In-situ</i> diagnosis of Ar/CH<sub>4</sub> helicon wave plasma for synthesis of carbon nanomaterials

Ji Pei-Yu; Huang Tian-Yuan; Chen Jia-Li; Zhuge Lan-Jian; Wu Xue-Mei

doi:10.7498/aps.70.20201809

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Ji Pei-Yu, Huang Tian-Yuan, Chen Jia-Li, Zhuge Lan-Jian, Wu Xue-Mei. In-situ diagnosis of Ar/CH4 helicon wave plasma for synthesis of carbon nanomaterialsJ. Acta Physica Sinica, 2021, 70(9): 097201. DOI: 10.7498/aps.70.20201809

Citation:

Ji Pei-Yu, Huang Tian-Yuan, Chen Jia-Li, Zhuge Lan-Jian, Wu Xue-Mei. In-situ diagnosis of Ar/CH4 helicon wave plasma for synthesis of carbon nanomaterialsJ. Acta Physica Sinica, 2021, 70(9): 097201. DOI: 10.7498/aps.70.20201809

Citation:

Ji Pei-Yu, Huang Tian-Yuan, Chen Jia-Li, Zhuge Lan-Jian, Wu Xue-Mei. In-situ diagnosis of Ar/CH4 helicon wave plasma for synthesis of carbon nanomaterialsJ. Acta Physica Sinica, 2021, 70(9): 097201. DOI: 10.7498/aps.70.20201809