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中国物理学会期刊
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Gao Pei-Li, Zhang Zhen-Yu, Wang Dong, Zhang Le-Zhen, Xu Guang-Hong, Meng Fan-Ning, Xie Wen-Xiang, Bi Sheng. Research progress of green chemical mechanical polishing slurryJ. Acta Physica Sinica, 2021, 70(6): 068101. DOI: 10.7498/aps.70.20201917
Citation: Gao Pei-Li, Zhang Zhen-Yu, Wang Dong, Zhang Le-Zhen, Xu Guang-Hong, Meng Fan-Ning, Xie Wen-Xiang, Bi Sheng. Research progress of green chemical mechanical polishing slurryJ. Acta Physica Sinica, 2021, 70(6): 068101. DOI: 10.7498/aps.70.20201917
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Research progress of green chemical mechanical polishing slurry

Acta Phys. Sin., 2021, 70(6): 068101.
DOI: 10.7498/aps.70.20201917
CSTR: 32037.14.aps.70.20201917
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