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中国物理学会期刊
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Chen Chang-Zi, Ma Dong-Lin, Li Yan-Tao, Leng Yong-Xiang. Discharge model and plasma characteristics of high-power pulsed magnetron sputtering titanium targetJ. Acta Physica Sinica, 2021, 70(18): 180701. DOI: 10.7498/aps.70.20202050
Citation: Chen Chang-Zi, Ma Dong-Lin, Li Yan-Tao, Leng Yong-Xiang. Discharge model and plasma characteristics of high-power pulsed magnetron sputtering titanium targetJ. Acta Physica Sinica, 2021, 70(18): 180701. DOI: 10.7498/aps.70.20202050
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Discharge model and plasma characteristics of high-power pulsed magnetron sputtering titanium target

Acta Phys. Sin., 2021, 70(18): 180701.
DOI: 10.7498/aps.70.20202050
CSTR: 32037.14.aps.70.20202050
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