Axial diagnosis of radio-frequency capacitively coupled Ar/O<sub>2</sub> plasma

Cao Li-Yang; Ma Xiao-Ping; Deng Li-Li; Lu Man-Ting; Xin Yu

doi:10.7498/aps.70.20202113

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Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu. Axial diagnosis of radio-frequency capacitively coupled Ar/O2 plasmaJ. Acta Physica Sinica, 2021, 70(11): 115204. DOI: 10.7498/aps.70.20202113

Citation:

Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu. Axial diagnosis of radio-frequency capacitively coupled Ar/O2 plasmaJ. Acta Physica Sinica, 2021, 70(11): 115204. DOI: 10.7498/aps.70.20202113

Citation:

Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu. Axial diagnosis of radio-frequency capacitively coupled Ar/O2 plasmaJ. Acta Physica Sinica, 2021, 70(11): 115204. DOI: 10.7498/aps.70.20202113