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Zhang Yu-Ru, Gao Fei, Wang You-Nian. Numerical investigation of low pressure inductively coupled plasma sources: A reviewJ. Acta Physica Sinica, 2021, 70(9): 095206. DOI: 10.7498/aps.70.20202247
Citation: Zhang Yu-Ru, Gao Fei, Wang You-Nian. Numerical investigation of low pressure inductively coupled plasma sources: A reviewJ. Acta Physica Sinica, 2021, 70(9): 095206. DOI: 10.7498/aps.70.20202247
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Numerical investigation of low pressure inductively coupled plasma sources: A review

Acta Phys. Sin., 2021, 70(9): 095206.
DOI: 10.7498/aps.70.20202247
CSTR: 32037.14.aps.70.20202247
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