Electron heating dynamics and plasma parameters control in capacitively coupled plasma

Wang Li; Wen De-Qi; Tian Chong-Biao; Song Yuan-Hong; Wang You-Nian

doi:10.7498/aps.70.20210473

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Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian. Electron heating dynamics and plasma parameters control in capacitively coupled plasmaJ. Acta Physica Sinica, 2021, 70(9): 095214. DOI: 10.7498/aps.70.20210473

Citation:

Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian. Electron heating dynamics and plasma parameters control in capacitively coupled plasmaJ. Acta Physica Sinica, 2021, 70(9): 095214. DOI: 10.7498/aps.70.20210473

Citation:

Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian. Electron heating dynamics and plasma parameters control in capacitively coupled plasmaJ. Acta Physica Sinica, 2021, 70(9): 095214. DOI: 10.7498/aps.70.20210473