Fiber-optic microphone based on bionic silicon micro-electro-mechanical system diaphragm

Liu Xin; Cai Chen; Dong Zhi-Fei; Deng Xin; Hu Xin-Yu; Qi Zhi-Mei

doi:10.7498/aps.71.20212229

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Liu Xin, Cai Chen, Dong Zhi-Fei, Deng Xin, Hu Xin-Yu, Qi Zhi-Mei. Fiber-optic microphone based on bionic silicon micro-electro-mechanical system diaphragmJ. Acta Physica Sinica, 2022, 71(9): 094301. DOI: 10.7498/aps.71.20212229

Citation:

Liu Xin, Cai Chen, Dong Zhi-Fei, Deng Xin, Hu Xin-Yu, Qi Zhi-Mei. Fiber-optic microphone based on bionic silicon micro-electro-mechanical system diaphragmJ. Acta Physica Sinica, 2022, 71(9): 094301. DOI: 10.7498/aps.71.20212229

Citation:

Liu Xin, Cai Chen, Dong Zhi-Fei, Deng Xin, Hu Xin-Yu, Qi Zhi-Mei. Fiber-optic microphone based on bionic silicon micro-electro-mechanical system diaphragmJ. Acta Physica Sinica, 2022, 71(9): 094301. DOI: 10.7498/aps.71.20212229