Two-dimensional fluid simulation of spatial distribution of dust particles in a capacitively coupled silane plasma

Duan Meng-Yue; Jia Wen-Zhu; Zhang Ying-Ying; Zhang Yi-Fan; Song Yuan-Hong

doi:10.7498/aps.72.20230686

Search

x

Duan Meng-Yue, Jia Wen-Zhu, Zhang Ying-Ying, Zhang Yi-Fan, Song Yuan-Hong. Two-dimensional fluid simulation of spatial distribution of dust particles in a capacitively coupled silane plasmaJ. Acta Physica Sinica, 2023, 72(16): 165202. DOI: 10.7498/aps.72.20230686

Citation:

Duan Meng-Yue, Jia Wen-Zhu, Zhang Ying-Ying, Zhang Yi-Fan, Song Yuan-Hong. Two-dimensional fluid simulation of spatial distribution of dust particles in a capacitively coupled silane plasmaJ. Acta Physica Sinica, 2023, 72(16): 165202. DOI: 10.7498/aps.72.20230686

Citation:

Duan Meng-Yue, Jia Wen-Zhu, Zhang Ying-Ying, Zhang Yi-Fan, Song Yuan-Hong. Two-dimensional fluid simulation of spatial distribution of dust particles in a capacitively coupled silane plasmaJ. Acta Physica Sinica, 2023, 72(16): 165202. DOI: 10.7498/aps.72.20230686