Dislocation reduction mechanism os GaN films on vicinal sapphire substrates

Xu Shuang; Xu Sheng-Rui; Wang Xin-Hao; Lu Hao; Liu Xu; Yun Bo-Xiang; Zhang Ya-Chao; Zhang Tao; Zhang Jin-Cheng; Hao Yue

doi:10.7498/aps.72.20230793

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Xu Shuang, Xu Sheng-Rui, Wang Xin-Hao, Lu Hao, Liu Xu, Yun Bo-Xiang, Zhang Ya-Chao, Zhang Tao, Zhang Jin-Cheng, Hao Yue. Dislocation reduction mechanism os GaN films on vicinal sapphire substratesJ. Acta Physica Sinica, 2023, 72(19): 196101. DOI: 10.7498/aps.72.20230793

Citation:

Xu Shuang, Xu Sheng-Rui, Wang Xin-Hao, Lu Hao, Liu Xu, Yun Bo-Xiang, Zhang Ya-Chao, Zhang Tao, Zhang Jin-Cheng, Hao Yue. Dislocation reduction mechanism os GaN films on vicinal sapphire substratesJ. Acta Physica Sinica, 2023, 72(19): 196101. DOI: 10.7498/aps.72.20230793

Citation:

Xu Shuang, Xu Sheng-Rui, Wang Xin-Hao, Lu Hao, Liu Xu, Yun Bo-Xiang, Zhang Ya-Chao, Zhang Tao, Zhang Jin-Cheng, Hao Yue. Dislocation reduction mechanism os GaN films on vicinal sapphire substratesJ. Acta Physica Sinica, 2023, 72(19): 196101. DOI: 10.7498/aps.72.20230793